Thermal analysis for ion beam processing of the unimorph deformable mirror

Zhanbin Fan; Chaoliang Guan; Guipeng Tie; Shanyong Chen

doi:10.1117/12.2316952

24 April 2018 Thermal analysis for ion beam processing of the unimorph deformable mirror

Zhanbin Fan, Chaoliang Guan, Guipeng Tie, Shanyong Chen

Proceedings Volume 10712, Optical Manipulation Conference; 107121L (2018) https://doi.org/10.1117/12.2316952
Event: SPIE Structured Light, 2018, Yokohama, Japan

Abstract

The unimorph deformable mirror (DM) is favored in the field of synchrotron radiation due to its simple structure, dynamic surface figure and adaptive adjustment. The request of mirror surface accuracy on the synchrotron radiation beam focus can be up to sub-nanometer RMS. Ion beam figuring is a high precision processing method with noncontacting and roughness damage. However, because it belongs to the type of thermal manufacturing, the adhesive layer characteristic is changed and the DM’s figuring accuracy is reduced by the thermal deformation. In this paper, thermal simulation and temperature test of the adhesive during ion beam processing are carried out; The variation law of temperature and thermal stress of the adhesive layer with different ion beam diaphragms and scanning times are obtained. Therefore, the selective guideline for the diaphragm is obtained. With the optimal process parameters, the temperature of the adhesive layer is decreased with the minimum temperature between the glass transition temperature Tg and 1/2 of the Curie temperature Tc.

Citation Download Citation

Zhanbin Fan, Chaoliang Guan, Guipeng Tie, and Shanyong Chen "Thermal analysis for ion beam processing of the unimorph deformable mirror", Proc. SPIE 10712, Optical Manipulation Conference, 107121L (24 April 2018); https://doi.org/10.1117/12.2316952

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KEYWORDS

Ion beams

Adhesives

Mirrors

Optical simulations

Temperature metrology

Ceramics

Synchrotron radiation

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