Analysis of computer-generated holographic microstructure fabricated by femtosecond laser

Zihao Gan; Xiaoqiang Peng; Chaoliang Guan; Zuocai Dai

doi:10.1117/12.2505174

6 February 2019 Analysis of computer-generated holographic microstructure fabricated by femtosecond laser

Zihao Gan, Xiaoqiang Peng, Chaoliang Guan, Zuocai Dai

Proceedings Volume 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology; 1084219 (2019) https://doi.org/10.1117/12.2505174
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Computer-generated hologram (CGH) is an important component for high-precision aspherical surface testing. This paper puts forward a manufacturing method of amplitude-type CGH by femtosecond laser direct etching, and carries out detailed analysis and demonstration. Firstly, the demand of microstructure fabrication of amplitude-type CGH was analyzed by optical diffraction theory. Furthermore, we have established the theoretical model of femtosecond laser machining amplitude-type CGH fringe. Finally, we developed basic verification experiments, and analyzed the feasibility of fabricating CGH by direct etching process based on the testing results of processing fringe characteristics.

Citation Download Citation

Zihao Gan, Xiaoqiang Peng, Chaoliang Guan, and Zuocai Dai "Analysis of computer-generated holographic microstructure fabricated by femtosecond laser", Proc. SPIE 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology, 1084219 (6 February 2019); https://doi.org/10.1117/12.2505174

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