Applications of STM Technologies

Paul E. West; Sheila Henely

doi:10.1117/12.953113

19 July 1989 Applications of STM Technologies

Paul E. West, Sheila Henely

Proceedings Volume 1087, Integrated Circuit Metrology, Inspection, and Process Control III; (1989) https://doi.org/10.1117/12.953113
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

Measurement of submicron device structures on semiconductors requires increased accuracy from metrology equipment. Scanning Tunneling Microscopy (STM) techniques are being used to meet these needs. Operating in air, these devices generate 3-D images of surface features with a resolution similar to that of a Scanning Electron Microscope (SEM) operating in vacuum.

Citation Download Citation

Paul E. West and Sheila Henely "Applications of STM Technologies", Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); https://doi.org/10.1117/12.953113

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