Synergistic Effects Of Softbake And Hardbake On Thermal Softening Using Statistically Designed Experiments

K. L. Bell; E. M. Holicky; L. D. H. Christensen

doi:10.1117/12.953121

19 July 1989 Synergistic Effects Of Softbake And Hardbake On Thermal Softening Using Statistically Designed Experiments

K. L. Bell, E. M. Holicky, L. D. H. Christensen

Proceedings Volume 1087, Integrated Circuit Metrology, Inspection, and Process Control III; (1989) https://doi.org/10.1117/12.953121
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

The purpose of this paper is to present a statistically designed approach to identify and characterize the observed interactions between hardbake and softbake on thermal softening and the ensuing post-hardbake feature deformities. A statistically designed experiment (SDE) was employed for the simplicity of experimentation and maximal results obtained with such an approach. The processing parameters evaluated and optimized in this SDE included softbake temperature (Ts), softbake time (ts), and hardbake temperature, (Th). The magnitude of the interaction between softbake and hardbake processing parameters was calculated according to a quadratic fit of the primary response attribute. Softbake and hardbake process steps were characterized and found to be synergistic with respect to their effects on the resulting post-hardbake microlithographic feature shape.

Citation Download Citation

K. L. Bell, E. M. Holicky, and L. D. H. Christensen "Synergistic Effects Of Softbake And Hardbake On Thermal Softening Using Statistically Designed Experiments", Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); https://doi.org/10.1117/12.953121

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