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13 March 2019 Laser material processing in the ablation-cooled regime: Ablation efficiency and quality using single fs-, bursts of fs-, and single ns-pulses (Conference Presentation)
Matthias Domke, Sandra Stroj, Victor Matylitsky
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Proceedings Volume 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV; 1090502 (2019) https://doi.org/10.1117/12.2514441
Event: SPIE LASE, 2019, San Francisco, California, United States
Abstract
In recent years, the burst-mode caused a lot of attention and confusion in the field of micro machining with ultrashort-pulsed lasers. There is an ongoing debate about the laser-matter interaction and the impact on ablation efficiency and quality of applying burst trains with two to hundreds of pulses at MHz to GHz frequencies. Our results reveal that the ablation behaviour achieved with bursts of 28 pulses at 154 MHz is rather similar to the ablation with a ns-laser with a pulse duration equal to the temporal burst train length of 175 ns than to a fs-laser operated in single-pulse mode.
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Matthias Domke, Sandra Stroj, and Victor Matylitsky "Laser material processing in the ablation-cooled regime: Ablation efficiency and quality using single fs-, bursts of fs-, and single ns-pulses (Conference Presentation)", Proc. SPIE 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, 1090502 (13 March 2019); https://doi.org/10.1117/12.2514441
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KEYWORDS
Laser ablation
Laser processing
Laser-matter interactions
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