Research of the microelectromechanical switch with diﬀerent materials of metal membrane

Igor E. Lysenko; Alexey V. Tkachenko; Olga A. Ezhova

doi:10.1117/12.2521420

15 March 2019 Research of the microelectromechanical switch with diﬀerent materials of metal membrane

Igor E. Lysenko, Alexey V. Tkachenko, Olga A. Ezhova

Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 110220Q (2019) https://doi.org/10.1117/12.2521420
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation

Abstract

This paper is devoted to the selection of the optimal material for the structural layer of microelectromechanical switches in order to reduce or completely eliminate the stiction of the moving parts of the structure to the fixed, as well as to minimize the values of the control voltages and switching speed without compromising reliability using the Ashby approach. The choice of the most suitable structural layer material is represented by performance indices for a number of key parameters of microelectromechanical switches. It is established that aluminum-based alloys and metals are the most preferable than other available materials for the structural layer of microelectromechanical switches.

Citation Download Citation

Igor E. Lysenko, Alexey V. Tkachenko, and Olga A. Ezhova "Research of the microelectromechanical switch with diﬀerent materials of metal membrane", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220Q (15 March 2019); https://doi.org/10.1117/12.2521420

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