Finite-element predictive 3D modelling and optimization of membrane-based thermoresistive MEMS accelerometers

N. A. Djuzhev; R. V. Lapshin; A. M. Belin; A. I. Ovodov; D. V. Novikov; G. D. Demin

doi:10.1117/12.2522515

15 March 2019 Finite-element predictive 3D modelling and optimization of membrane-based thermoresistive MEMS accelerometers

N. A. Djuzhev, R. V. Lapshin, A. M. Belin, A. I. Ovodov, D. V. Novikov, G. D. Demin

Author Affiliations +

Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 110220R (2019) https://doi.org/10.1117/12.2522515
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation

Abstract

A three-dimensional numerical model of a thermal accelerometer with a thermal resistance effect in a sensitive element on a thin-film multilayer membrane based on MEMS technology has been developed and tested. The change in temperature difference on thermistors in the acceleration range from 1 to 10g and the applicability of the proposed technological solution for the implementation of thermal inertial systems are analyzed. The results obtained can be used for the optimization and development of a multi-axis thermal accelerometer.

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N. A. Djuzhev, R. V. Lapshin, A. M. Belin, A. I. Ovodov, D. V. Novikov, and G. D. Demin "Finite-element predictive 3D modelling and optimization of membrane-based thermoresistive MEMS accelerometers", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220R (15 March 2019); https://doi.org/10.1117/12.2522515

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