ANSYS simulation of the microaccelerometer sensor

S. Timoshenkov; V. Kalugin; S. Anchutin; E. Kochurina

doi:10.1117/12.2521783

15 March 2019 ANSYS simulation of the microaccelerometer sensor

S. Timoshenkov, V. Kalugin, S. Anchutin, E. Kochurina

Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 110220S (2019) https://doi.org/10.1117/12.2521783
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation

Abstract

The use of the ANSYS software for modeling the design of the sensitive element of the microaccelerometer is considered. The article presents the results of modal and static analysis. The features of the manufacturing technology of the sensitive element of the micromechanical accelerometer are given.

Citation Download Citation

S. Timoshenkov, V. Kalugin, S. Anchutin, and E. Kochurina "ANSYS simulation of the microaccelerometer sensor", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220S (15 March 2019); https://doi.org/10.1117/12.2521783

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