Microchannels on aluminosilicate glass fabricated by selective laser etching

Lingfeng Jiang; Chenlin Du; Bo Li; Dezhi Liang; Ke Wang

doi:10.1117/12.2524418

29 March 2019 Microchannels on aluminosilicate glass fabricated by selective laser etching

Lingfeng Jiang, Chenlin Du, Bo Li, Dezhi Liang, Ke Wang

Proceedings Volume 11046, Fifth International Symposium on Laser Interaction with Matter; 110462T (2019) https://doi.org/10.1117/12.2524418
Event: Fifth International Symposium on Laser Interaction with Matter, 2018, Changsha, China

Abstract

We demonstrate a technique called “In volume Selective Laser Etching” (ISLE) to combine femtosecond laser modification technique with chemical etching for the fabrication of microchannels in the aluminosilicate glass. The influence of laser power on the length-diameter ratio of microchannels is studied. We fabricated tapered aluminosilicate glass microchannels with diameters from 30 to 50 μm. We used the same method to modify surface of aluminosilicate glass, and obtained taper-free microgrooves with a width of 50 μm. The microgrooves had no length limitation. In industrial production, the surface roughness was also improved in this way.

Citation Download Citation

Lingfeng Jiang, Chenlin Du, Bo Li, Dezhi Liang, and Ke Wang "Microchannels on aluminosilicate glass fabricated by selective laser etching", Proc. SPIE 11046, Fifth International Symposium on Laser Interaction with Matter, 110462T (29 March 2019); https://doi.org/10.1117/12.2524418

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