A MEMS mirror driver ASIC for beam-steering in scanning MEMS-based LiDAR

Ievgeniia Maksymova; Philipp Greiner; Johannes Wiesmeier; Franz Darrer; Norbert Druml

doi:10.1117/12.2528312

9 September 2019 A MEMS mirror driver ASIC for beam-steering in scanning MEMS-based LiDAR

Ievgeniia Maksymova, Philipp Greiner, Johannes Wiesmeier, Franz Darrer, Norbert Druml

Proceedings Volume 11107, Laser Beam Shaping XIX; 111070C (2019) https://doi.org/10.1117/12.2528312
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

In this paper, a MEMS mirror driver ASIC that operates a 1D MEMS mirror with accurate amplitude is presented. It provides a set of position signals, precisely aligned to the MEMS mirror that enables a beam forming and laser shooting scheduling for LiDAR (Light Detection and Ranging) applications. The proposed architecture exploits a capacitive sense method and integrated control loops to sense, actuate and control the movements of the MEMS mirror. The implemented mixed-signal ASIC is fabricated in 130 nm CMOS technology, and can attain an RMS pointing error of less than 4m°for any tested MEMS mirror amplitude.

Citation Download Citation

Ievgeniia Maksymova, Philipp Greiner, Johannes Wiesmeier, Franz Darrer, and Norbert Druml "A MEMS mirror driver ASIC for beam-steering in scanning MEMS-based LiDAR", Proc. SPIE 11107, Laser Beam Shaping XIX, 111070C (9 September 2019); https://doi.org/10.1117/12.2528312

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