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9 September 2019 Development of 120-mm-long ellipsoidal mirror for soft x-ray microscopy
T. Kume, H. Hashizume, K. Hiraguri, Y. Imamura, H. Miyashita, T. Mukoda, Y. Matsuzawa, G. Yamaguchi, Y. Takeo, T. Shimamura, Y. Senba, H. Kishimoto, H. Ohashi, H. Mimura
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Proceedings Volume 11108, Advances in X-Ray/EUV Optics and Components XIV; 1110806 (2019) https://doi.org/10.1117/12.2528296
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States
Abstract
Ellipsoidal mirrors are ideal focusing optics for soft x-rays because of advantages that include high numerical aperture, high efficiency, and no chromatic aberrations. Shape accuracy of nanometer order is required on the internal surface of a mirror with a diameter of around 10 mm. Because of the difficulty of processing the internal surface, ellipsoidal mirrors are fabricated by replication of the shapes of master mandrels. In previous studies, a fabrication process was developed for x-ray ellipsoidal mirrors involving mandrel fabrication and nickel electroforming. 40-mm-long ellipsoidal mirrors were fabricated and a focused beam with full width at half maximum (FWHM) of 240 nm was obtained. For better focusing performance and expansion of the applicable energy range, we designed and fabricated a 120-mm-long ellipsoidal mirror from the master mandrel with a shape accuracy of 3.8 nm (root mean square). A focusing experiment was also performed at the synchrotron radiation facility, SPring-8 (BL25SU). A focused beam with FWHM of 1 μm was obtained.
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T. Kume, H. Hashizume, K. Hiraguri, Y. Imamura, H. Miyashita, T. Mukoda, Y. Matsuzawa, G. Yamaguchi, Y. Takeo, T. Shimamura, Y. Senba, H. Kishimoto, H. Ohashi, and H. Mimura "Development of 120-mm-long ellipsoidal mirror for soft x-ray microscopy", Proc. SPIE 11108, Advances in X-Ray/EUV Optics and Components XIV, 1110806 (9 September 2019); https://doi.org/10.1117/12.2528296
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KEYWORDS
Mirrors
X-rays
X-ray microscopy
X-ray optics
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