Three-dimensional morphology measurement of microgrooves based on Dammann zone plate

Zonghao Ye; Changhe Zhou; Jin Wang; Junjie Li; Ge Jin

doi:10.1117/12.2536473

18 November 2019 Three-dimensional morphology measurement of microgrooves based on Dammann zone plate

Zonghao Ye, Changhe Zhou, Jin Wang, Junjie Li, Ge Jin

Proceedings Volume 11188, Holography, Diffractive Optics, and Applications IX; 111880L (2019) https://doi.org/10.1117/12.2536473
Event: SPIE/COS Photonics Asia, 2019, Hangzhou, China

Abstract

With the rapid development of precision manufacturing, the optical non-contact three-dimensional measurement method for detecting the morphology of tiny objects has gradually become a hot topic with the advantages of high speed, high precision, large measuring range and high repeatability. When the depth of the microgroove reaches a certain range, the general three-dimensional measurement method cannot be used since the depth of focus is usually not deep enough. In this paper, we proposed a new method of detecting based on the grating projection for detecting phase, which introduced a novel diffractive optical device called Dammann zone plate for measuring three-dimensional shape of tiny objects with an extend of focal length. Dammann grating can produce a finite array of uniform intensity spots in the Fourier transforming plane by modulating the transverse position of the transition points of the binary optical phase. Using this feature, the Dammann zone plate takes advantage of the periodic coding details of the Dammann grating for producing an axial multi-focus system with equal intensity in the focusing system when combined with a focusing lens. This experiment, the depth of focus is greatly extended due to the introduction of Dammann zone plate, which can measure deeper grooves. Therefore, we can collect more three-dimensional information of the tiny object with a CCD camera, and then we can obtain more accurate three-dimensional morphologic profile. This method is simple, accurate and robust for practical applications, so it is highly interesting for detecting deeper grooves of tiny objects.

Citation Download Citation

Zonghao Ye, Changhe Zhou, Jin Wang, Junjie Li, and Ge Jin "Three-dimensional morphology measurement of microgrooves based on Dammann zone plate", Proc. SPIE 11188, Holography, Diffractive Optics, and Applications IX, 111880L (18 November 2019); https://doi.org/10.1117/12.2536473

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Zone plates

Measurement devices

Objectives

3D metrology

Binary data

Charge-coupled devices

Light sources

Show All Keywords

Keywords/Phrases

Search In:

Publication Years