Thickness measurement opaque material by swept source optical coherence tomography

Qian Wu; Jianing Dai; Jie Zhu; Xiwen Wang; Xinjian Chen; Jianhua Mo

doi:10.1117/12.2537686

18 November 2019 Thickness measurement opaque material by swept source optical coherence tomography

Qian Wu, Jianing Dai, Jie Zhu, Xiwen Wang, Xinjian Chen, Jianhua Mo

Proceedings Volume 11189, Optical Metrology and Inspection for Industrial Applications VI; 111891L (2019) https://doi.org/10.1117/12.2537686
Event: SPIE/COS Photonics Asia, 2019, Hangzhou, China

Abstract

Optical coherence tomography (OCT) is a non-destructive and non-contact sensing tool for imaging optical scattering media with microscopic spatial resolution. According to its imaging mechanism, this technology is very suitable for imaging and thickness measurement of multilayer structures. Thus, OCT has been widely used for medical diagnostics and non-destructive inspection in industries. However, due to the limited imaging depth, OCT can only be used for non-opaque materials. In this study, we developed a novel technique based on OCT imaging for thickness measurement of opaque materials. To demonstrate the ability of the technique, we obtained a double side view by establishing two symmetrical sample beams based on a home-built 1060nm swept source OCT system. Using the OCT system we developed, we can collect two surface contour information for non-transparent materials, and eventually calculate the thickness of the nontransparent material. The results show that the developed system keeps the imaging capability of OCT and further extend for opaque material thickness measurement.

Citation Download Citation

Qian Wu, Jianing Dai, Jie Zhu, Xiwen Wang, Xinjian Chen, and Jianhua Mo "Thickness measurement opaque material by swept source optical coherence tomography", Proc. SPIE 11189, Optical Metrology and Inspection for Industrial Applications VI, 111891L (18 November 2019); https://doi.org/10.1117/12.2537686

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