The fundamental optical diffraction in infrared microscopes limits their spatial resolution to about ~5μm and hinders the detailed observation of heat generation and dissipation behaviors in micrometer-sized optoelectronic and semiconductor devices, thus impeding the understanding of basic material properties, electrical shorts and structural defects at a micron and sub-micron scale. We report the recent development of a scanning near-field optical microscopy (SNOM) method for thermal imaging with subwavelength spatial resolution. The system implements infrared fiber-optic probes with subwavelength apertures at the apex of a tip for coupling to thermal radiation. Topographic imaging and tip-to-sample distance control are enabled by the implementation of a macroscopic aluminum tuning fork of centimeter size to support IR thermal macro-probes. The SNOM-on-a-fork system is developed as a capability primarily for the thermal profiling of MWIR quantum cascade lasers (QCLs) during pulsed and continuous wave (CW) operation, targeting QCL design optimization. Time-resolved thermal measurements with high spatial resolution will enable better understanding of thermal effects that can have a significant impact on a laser's optical performance and reliability, and furthermore, will serve as a tool to diagnose failure mechanisms.
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