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11 September 2020 Scalable and durable glass-engraved meta-surfaces for high power laser ultra-thin optics
Eyal Feigenbaum, Jae Hyuck Yoo, Nathan Ray, Hoang Nguyen, Mike Johnson, Salmaan Baxamusa, Selim Elhadj
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Proceedings Volume 11514, Laser-induced Damage in Optical Materials 2020; 1151417 (2020) https://doi.org/10.1117/12.2572230
Event: SPIE Laser Damage, 2020, Online Only
Abstract
We present a method for producing spatially patterned glass engraved meta-surfaces, which is scalable, has high mechanical stability and high laser damage durability, and thus promising for ultra-thin optics implementation for high-power lasers. The process is based on laser raster-scan of a thin metal film on a glass, followed by dry-etching and removal of the metal mask. We present fabricated structures, characterization of their optical performance, mechanical stability and laser damage performance.
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Eyal Feigenbaum, Jae Hyuck Yoo, Nathan Ray, Hoang Nguyen, Mike Johnson, Salmaan Baxamusa, and Selim Elhadj "Scalable and durable glass-engraved meta-surfaces for high power laser ultra-thin optics", Proc. SPIE 11514, Laser-induced Damage in Optical Materials 2020, 1151417 (11 September 2020); https://doi.org/10.1117/12.2572230
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KEYWORDS
High power lasers
Laser optics
Gold
Laser induced damage
Optical components
Silica
Dielectrics
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