Real-time laser displacement measurement based on intensity correlation with phase-modulated signal and its measurement range extension

Hiroto Shimpo; Naoki Kashiwagura; Yosuke Tanaka

doi:10.1117/12.2580503

8 November 2020 Real-time laser displacement measurement based on intensity correlation with phase-modulated signal and its measurement range extension

Hiroto Shimpo, Naoki Kashiwagura, Yosuke Tanaka

Author Affiliations +

Proceedings Volume 11525, SPIE Future Sensing Technologies; 1152508 (2020) https://doi.org/10.1117/12.2580503
Event: SPIE Future Sensing Technologies, 2020, Online Only

Abstract

A method for measurement range extension without deteriorating the accuracy is proposed on real-time laser displacement measurement based on intensity correlation with phase-modulated signal that we have been investigating for years. The proposed method uses the phase sign of the fundamental and second harmonic frequency components of the detected signal, where these components are expressed by sinusoidal and cosinusoidal functions. In principle, any displacement is measured from the combination of the amplitudes and phase signs of the detected signal components. We performed proof-of-concept experiments of displacement measurement by using a precision motorized stage and successfully confirmed the principle.

Conference Presentation

Citation Download Citation

Hiroto Shimpo, Naoki Kashiwagura, and Yosuke Tanaka "Real-time laser displacement measurement based on intensity correlation with phase-modulated signal and its measurement range extension", Proc. SPIE 11525, SPIE Future Sensing Technologies, 1152508 (8 November 2020); https://doi.org/10.1117/12.2580503

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