A high dynamic range MOEMS accelerometer based on multi-order diffraction method

Yuan Yao; Debin Pan; Jie Guo; Yuan Zhao; Tingting Dong; Jianbo Wang

doi:10.1117/12.2574169

10 October 2020 A high dynamic range MOEMS accelerometer based on multi-order diffraction method

Yuan Yao, Debin Pan, Jie Guo, Yuan Zhao, Tingting Dong, Jianbo Wang

Author Affiliations +

Proceedings Volume 11547, Optoelectronic Devices and Integration IX; 115471F (2020) https://doi.org/10.1117/12.2574169
Event: SPIE/COS Photonics Asia, 2020, Online Only

Abstract

A high dynamic range MOEMS accelerometer based on multi-order diffraction method is presented in this paper. The accelerometer consists of a frequency-stabilized laser source, a diffraction grating, and a mirror attached to a mass block with symmetric cantilever beams, to achieve a few ug resolution. The traditional interferometry only uses the ±1 order diffraction, the accelerometer can obtain high measurement accuracy but the measurement range remains only several mg. This paper introduces a new interferometric method combining ±1 and ±3 order diffraction, and the model of multi-order diffraction measurement is established. The higher order diffraction intensity is proportional to the lower order diffraction intensity, so the higher order diffraction light can be used to improve the dynamic range of the system. And positive and negative order diffraction difference can suppress the common mode noise at the same time. Theoretical analysis and experimental results show that the dynamic range of accelerometer is improved by 9 times under the condition that other conditions remain unchanged.

Citation Download Citation

Yuan Yao, Debin Pan, Jie Guo, Yuan Zhao, Tingting Dong, and Jianbo Wang "A high dynamic range MOEMS accelerometer based on multi-order diffraction method", Proc. SPIE 11547, Optoelectronic Devices and Integration IX, 115471F (10 October 2020); https://doi.org/10.1117/12.2574169

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KEYWORDS

Diffraction

High dynamic range imaging

Microopto electromechanical systems

Interferometry

Diffraction gratings

Laser sources

Magnesium

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