A location error calibration method for multiple probing systems

Sen Zhou; Jian Xu; Tao Lei; Yu Yan; Liu Tong

doi:10.1117/12.2572686

10 October 2020 A location error calibration method for multiple probing systems

Sen Zhou, Jian Xu, Tao Lei, Yu Yan, Liu Tong

Author Affiliations +

Proceedings Volume 11552, Optical Metrology and Inspection for Industrial Applications VII; 1155212 (2020) https://doi.org/10.1117/12.2572686
Event: SPIE/COS Photonics Asia, 2020, Online Only

Conference Poster

Abstract

A CMM with multiple probing systems have the power to deliver tremendous benefits to most notably manufacturing, and have the advantage of high automation, high integration and high precision. According to the ISO standard 10360-9, multiple probing system location error should be identify and calibrated before use. In this paper, a location error self-calibration model was established based on a composite artifact. The location error of individual probing system can be respectively determined reference to the position of the probe configuration. An error separation procedure was introduced to correct this location error. A series of representative experiments were performed on a commercial combined probing system produced by our partner. The experimental results show that multiple probing systems location error was effectively reduced from 4.5μm to2.8μm. Also, this calibration evaluation is very apparently practical outside a laboratory due to its simple, portable, low-cost, and rational procedure.

Conference Presentation

Citation Download Citation

Sen Zhou, Jian Xu, Tao Lei, Yu Yan, and Liu Tong "A location error calibration method for multiple probing systems", Proc. SPIE 11552, Optical Metrology and Inspection for Industrial Applications VII, 1155212 (10 October 2020); https://doi.org/10.1117/12.2572686

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