Signal weighted overlay optimizer for scatterometry metrology

A. Yagil; R. Dirawi; W. L. Lin; A. Volfman; Y. Men; R. Milo; T. Yaziv; Y. Lamhot

doi:10.1117/12.2583866

22 February 2021 Signal weighted overlay optimizer for scatterometry metrology

A. Yagil, R. Dirawi, W. L. Lin, A. Volfman, Y. Men, R. Milo, T. Yaziv, Y. Lamhot

Proceedings Volume 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV; 1161124 (2021) https://doi.org/10.1117/12.2583866
Event: SPIE Advanced Lithography, 2021, Online Only

Abstract

A new algorithm called Single Wavelength Overlay Optimizer (SWOOP) enhances the performance of single-wavelength optical diffraction-based overlay metrology. SWOOP combines statistical learning with a physical model to advance the performance of single-wavelength measurements to that of multi-wavelength measurements. This is achieved by making a set of multi-wavelength measurements on the first wafer during a train phase and extracting the characteristic signature of the overlay inaccuracy at the pupil plane. This inaccuracy signature is then evaluated and removed in real time for single-wavelength measurements, resulting in improved accuracy and robustness to process variation without compromising throughput.

Conference Presentation

Citation Download Citation

A. Yagil, R. Dirawi, W. L. Lin, A. Volfman, Y. Men, R. Milo, T. Yaziv, and Y. Lamhot "Signal weighted overlay optimizer for scatterometry metrology", Proc. SPIE 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV, 1161124 (22 February 2021); https://doi.org/10.1117/12.2583866

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