Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method

Vamara Dembele; Inho Choi; Saeid Kheiryzadehkhanghah; Daesuk Kim

doi:10.1117/12.2592650

20 June 2021 Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method

Vamara Dembele, Inho Choi, Saeid Kheiryzadehkhanghah, Daesuk Kim

Author Affiliations +

Proceedings Volume 11783, Modeling Aspects in Optical Metrology VIII; 117830N (2021) https://doi.org/10.1117/12.2592650
Event: SPIE Optical Metrology, 2021, Online Only

Abstract

We describe a dynamic spectral ellipsometric Direct filtering phase extraction method based on a monolithic polarizing Michelson interferometry scheme. The proposed dynamic phase extraction method is three times faster and it can evaluate a spectrally resolved ellipsometric phase Δ(k) with utmost the same level of precision and accuracy compared to Fourier Transform method. The performance of the proposed dynamic spectral ellipsometric phase extraction method is demonstrated by using a SiO₂ thin film with a nominal thickness of 500 nm deposited on Si bare wafer.

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Vamara Dembele, Inho Choi, Saeid Kheiryzadehkhanghah, and Daesuk Kim "Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method", Proc. SPIE 11783, Modeling Aspects in Optical Metrology VIII, 117830N (20 June 2021); https://doi.org/10.1117/12.2592650

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