Resolution evaluation of displacement measuring interferometer with sinusoidal phase modulation and modified phase-locked loop

Masato Aketagawa; Masato Higuchi; Tomohiro Sowa; Dong Wei; Masato Aketagawa

doi:10.1117/12.2616268

27 October 2021 Resolution evaluation of displacement measuring interferometer with sinusoidal phase modulation and modified phase-locked loop

Masato Aketagawa, Masato Higuchi, Tomohiro Sowa, Dong Wei, Masato Aketagawa

Author Affiliations +

Proceedings Volume 11927, Optical Technology and Measurement for Industrial Applications Conference 2021; 119270K (2021) https://doi.org/10.1117/12.2616268
Event: SPIE Technologies and Applications of Structured Light, 2021, Online, Japan

Abstract

A resolution evaluation of displacement measuring interferometer using a sinusoidal phase modulation (SPM) and a modified phase-locked loop (PLL) is discribed in this presentation. Displacement measuring interferometer with frequency stabilized light source has advantages of high resolution and traceable to the definition, and the combination of the SPM and modified PLL is one of the interpolation methods to improve the resolution of displacement measuring interferometer. The resolution is evaluated by noise floor measurement and small step displacement measurement. The results show that the measurement system could observe step displacement as small as 0.1 nm, but the noise floor contains drift and noise peaks at certain frequencies.

Citation Download Citation

Masato Aketagawa, Masato Higuchi, Tomohiro Sowa, Dong Wei, and Masato Aketagawa "Resolution evaluation of displacement measuring interferometer with sinusoidal phase modulation and modified phase-locked loop", Proc. SPIE 11927, Optical Technology and Measurement for Industrial Applications Conference 2021, 119270K (27 October 2021); https://doi.org/10.1117/12.2616268

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