Design And Testing Of A Microscopic Reflectometer

Jay McClellan; Norman Wittels; Allison Gotkin; Cathy Hepp; Patrick King

doi:10.1117/12.969845

1 April 1990 Design And Testing Of A Microscopic Reflectometer

Jay McClellan, Norman Wittels, Allison Gotkin, Cathy Hepp, Patrick King

Proceedings Volume 1194, Optics, Illumination, and Image Sensing for Machine Vision IV; (1990) https://doi.org/10.1117/12.969845
Event: 1989 Symposium on Visual Communications, Image Processing, and Intelligent Robotics Systems, 1989, Philadelphia, PA, United States

Abstract

A reflectometer was designed to measure reflectivities of sample areas ranging from 10 microns to 1 millimeter. It is capable of illuminating the sample from any angle between 0 and 45 degrees relative to the surface normal, with the observation angle always normal to the surface. The instrument was calibrated and tested using reflectivity standards. Plots of reflectivity versus illumination angle are presented for some common materials.

Citation Download Citation

Jay McClellan, Norman Wittels, Allison Gotkin, Cathy Hepp, and Patrick King "Design And Testing Of A Microscopic Reflectometer", Proc. SPIE 1194, Optics, Illumination, and Image Sensing for Machine Vision IV, (1 April 1990); https://doi.org/10.1117/12.969845

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