Step structure characterization using a metrological AFM rig based on nano measuring machine

Junjie Wu; Chengjie Fan; Jiasi Wei; Kaixin Sun; Yong Zhou; Yuan Li; Xiaoyu Cai

doi:10.1117/12.2616206

19 November 2021 Step structure characterization using a metrological AFM rig based on nano measuring machine

Junjie Wu, Chengjie Fan, Jiasi Wei, Kaixin Sun, Yong Zhou, Yuan Li, Xiaoyu Cai

Proceedings Volume 12059, Tenth International Symposium on Precision Mechanical Measurements; 120591X (2021) https://doi.org/10.1117/12.2616206
Event: Tenth International Symposium on Precision Mechanical Measurements, 2021, Qingdao, China

Abstract

This paper presents the characterization of step structures at multiple scales using a metrological AFM rig based on nano measuring machine. The AFM system achieves a measurement range of 25 mm × 25 mm × 5 mm with sub-nanometer resolution. An AFM signal amplifier is designed to match the signals of the AFM scanner and the NMM controller, and to increase noise attenuation. Step-height standards of 500 nm, 10 µm and 2 mm have been measured and evaluated using the presented AFM system. Methods to characterize ultra-high steps and sidewalls are also introduced.

Citation Download Citation

Junjie Wu, Chengjie Fan, Jiasi Wei, Kaixin Sun, Yong Zhou, Yuan Li, and Xiaoyu Cai "Step structure characterization using a metrological AFM rig based on nano measuring machine", Proc. SPIE 12059, Tenth International Symposium on Precision Mechanical Measurements, 120591X (19 November 2021); https://doi.org/10.1117/12.2616206

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