A high-precision laser displacement measurement system

Wenqing Pan; Dengwei Zhang; Cui Liang; Chao Ma; Xiaowu Shu; Shuangliang Che; Huizhu Hu

doi:10.1117/12.2606551

24 November 2021 A high-precision laser displacement measurement system

Wenqing Pan, Dengwei Zhang, Cui Liang, Chao Ma, Xiaowu Shu, Shuangliang Che, Huizhu Hu

Proceedings Volume 12065, AOPC 2021: Optical Sensing and Imaging Technology; 120652F (2021) https://doi.org/10.1117/12.2606551
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

The rapid development of modern science and technology puts forward higher and higher requirements for displacement measurement. As a non-contact measurement technology, laser ranging has played an important role in various fields for the unique advantages and has become a hot topic in the field of measurement research. At present, there are little research on high-precision displacement measurement at medium and long distance, the needs of which are widespread in practical application, so this work has important value. Among various laser ranging technologies, the laser triangulation method has the advantages of high-speed, high precision, simple structure, etc. Therefore, this paper chooses the direct laser triangulation method to carry out the research after analyzed the common types of laser triangulation system. In view of the requirements of high-precision displacement measurement requirements at medium and long distance, this article discussed the design of laser triangulation measuring system and the selection of structural parameters. Then we proposed a direct laser triangulation measurement structure under Scheimpflug conditions. This system selects PSD displacement transducer to collect the position information of the scattered light spot. After that, this paper discusses the principle of laser triangulation distance measurement and simulates the system. Then the influence of different parameters on high-precision displacement measurement and the relationship between them are investigated. Based on the research talked above, we got a set of structural parameters of the displacement measurement system. The measurement accuracy can be ~micron with the working distance of 500mm.

Citation Download Citation

Wenqing Pan, Dengwei Zhang, Cui Liang, Chao Ma, Xiaowu Shu, Shuangliang Che, and Huizhu Hu "A high-precision laser displacement measurement system", Proc. SPIE 12065, AOPC 2021: Optical Sensing and Imaging Technology, 120652F (24 November 2021); https://doi.org/10.1117/12.2606551

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KEYWORDS

Laser systems engineering

Sensors

Photodetectors

Imaging systems

Laser applications

Laser scattering

Light scattering

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