Aspheric surface polishing with orthogonal velocity polishing tool

Zhimin Rao; Haitao Liu; Jieli Wu; Qiang Chen; Dailu Wang

doi:10.1117/12.2604036

13 December 2021 Aspheric surface polishing with orthogonal velocity polishing tool

Zhimin Rao, Haitao Liu, Jieli Wu, Qiang Chen, Dailu Wang

Proceedings Volume 12070, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirror and Telescopes; 120700I (2021) https://doi.org/10.1117/12.2604036
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China

Abstract

An efficient orthogonal velocity polishing tool (OVPT) was developed. The OVPT was installed on the end flange of an industry robot. The movement range of the industry robot reaches φ 1000 millimeter. The robot OVPT is a highly efficiency processing method for aspheric precision optics manufacturing. In this paper, a 360 mm diameter fused silica parabolic mirror was polished by the robot OVPT. The convergence of OVPT based on an industry robot is outstanding. After 4 times of polishing, a final surface error RMS 16.6nm was achieved, and the initial surface error RMS was 69.5nm. A polished surface roughness Ra 1.5nm was achieved by robot OVPT.

Citation Download Citation

Zhimin Rao, Haitao Liu, Jieli Wu, Qiang Chen, and Dailu Wang "Aspheric surface polishing with orthogonal velocity polishing tool", Proc. SPIE 12070, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirror and Telescopes, 120700I (13 December 2021); https://doi.org/10.1117/12.2604036

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