New methods for measuring of surface landscape

C.Yu. Zenkova; D. I. Ivanskyi; V. M. Tkachuk; Yan Wenjun

doi:10.1117/12.2615517

20 December 2021 New methods for measuring of surface landscape

C.Yu. Zenkova, D. I. Ivanskyi, V. M. Tkachuk, Yan Wenjun

Proceedings Volume 12126, Fifteenth International Conference on Correlation Optics; 121260S (2021) https://doi.org/10.1117/12.2615517
Event: Fifteenth International Conference on Correlation Optics, 2021, Chernivtsi, Ukraine

Abstract

In this paper a new approach that enables to analyze the structure and reconstruct a rough surface with inhomogeneities is suggested, for which the heights distribution from the trough to the upper point is about 20 nm. For such diagnostics, carbon nanoparticles are used, which are characterized by luminescence in the yellow-green region of the spectrum and such a value of the dipole moment, which makes it possible to control the distribution of nanoparticles over the surface even in the presence of an external electric field. As a probe for diagnosing nanoparticles, it is suggested to use structured light with a significant longitudinal field component, which largely removes the limitations imposed by the transverse resolution of the optical system. The recorded luminescence of carbon nanoparticles with dipole moment oriented parallel to the longitudinal component of the field, enabled not only to reproduce the location of maxima and minima of the surface with an accuracy of 12.9%, but also to reconstruct the landscape of the studied surface itself at a level of 6.76% error.

Citation Download Citation

C.Yu. Zenkova, D. I. Ivanskyi, V. M. Tkachuk, and Yan Wenjun "New methods for measuring of surface landscape", Proc. SPIE 12126, Fifteenth International Conference on Correlation Optics, 121260S (20 December 2021); https://doi.org/10.1117/12.2615517

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