|
|
|
The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. Additional papers and presentation recordings may be available online in the SPIE Digital Library at SPIEDigitalLibrary.org. The papers reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon. Please use the following format to cite material from these proceedings: Author(s), “Title of Paper,” in International Conference on Micro- and Nano-Electronics 2021, edited by Vladimir F. Lukichev, Konstantin V. Rudenko, Proc. of SPIE 12157, Seven-digit Article CID Number (DD/MM/YYYY); (DOI URL). ISSN: 0277-786X ISSN: 1996-756X (electronic) ISBN: 9781510651906 ISBN: 9781510651913 (electronic) Published by SPIE P.O. Box 10, Bellingham, Washington 98227-0010 USA Telephone +1 360 676 3290 (Pacific Time) Copyright © 2022 Society of Photo-Optical Instrumentation Engineers (SPIE). Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of fees. To obtain permission to use and share articles in this volume, visit Copyright Clearance Center at copyright.com. Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher. Printed in the United States of America by Curran Associates, Inc., under license from SPIE. Publication of record for individual papers is online in the SPIE Digital Library.
Paper Numbering: A unique citation identifier (CID) number is assigned to each article in the Proceedings of SPIE at the time of publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online and print versions of the publication. SPIE uses a seven-digit CID article numbering system structured as follows:
IntroductionThe volume contains selected papers presented at the 14th International Conference "Micro- and Nanoelectronics – 2021" (ICMNE-2021) which has been held in Zvenigirod, Moscow Region, Russia during October 4-8, 2021. ICMNE is a biannual conference covering the main fields of micro- and nanoelectronic technologies and device physics. Since 1992 the Valiev Institute of Physics and Technology of Russian Academy of Sciences (Moscow, Russia) is the permanent organizer of ICMNE. From 2003 ICMNE is an SPIE-affiliated conference. ICMNE-2021 included the Extended Session "Quantum Informatics-2021". Overall scope contained such scientific and technological fields as physics and technologies of micro- and nanodevices, simulation and modeling, MEMS physics and technology, materials and films for micro- and nanoelectronics, metrology, quantum informatics. For the first time, a hybrid online/offline participation format was used for ICMNE conferences. The conference included three plenary sessions and 23 topical sessions covering the following areas of focus:
The scientific program was based on invited and contributed papers from the scientists employed at European and Siberian Regions of Russia, Belarus, Austria, France, UK, Israel, China, Japan, USA, and Canada. The contributions to the sessions of the Conference were made by academic institutions, universities as well as from the industry. Near 120 contributions were discussed at oral presentations; about 100 others were presented as posters. We hope that helpful discussions of these works at the sessions of the Conference and during personal contacts between attendees will promote the research activity in microelectronic community. Additional information about ICMNE-2021 can be found at the conference website http://www.icmne.ftian.ru Vladimir F. Lukichev |
