Microfabrication of the electromagnetic bandgap structure for incorporating into the dielectric substrate of the millimeter-band planar slow-wave structure

I. A. Chistyakov; I. I. Rasulov; A. G. Rozhnev; R. A. Torgashov; A. A. Serdobintzev; I. O. Kozhevnikov; V. V. Galushka; A. V. Starodubov

doi:10.1117/12.2630865

29 April 2022 Microfabrication of the electromagnetic bandgap structure for incorporating into the dielectric substrate of the millimeter-band planar slow-wave structure

I. A. Chistyakov, I. I. Rasulov, A. G. Rozhnev, R. A. Torgashov, A. A. Serdobintzev, I. O. Kozhevnikov, V. V. Galushka, A. V. Starodubov

Author Affiliations +

Proceedings Volume 12193, Laser Physics, Photonic Technologies, and Molecular Modeling; 121930K (2022) https://doi.org/10.1117/12.2630865
Event: XXV Annual Conference Saratov Fall Meeting 2021; and IX Symposium on Optics and Biophotonics, 2021, Saratov, Russian Federation

Abstract

Using artificial materials such as electromagnetic bandgap structures can be one of the promising ways to improve the efficiency of compact miniaturized vacuum electronic devices such as millimeter-band traveling-wave tubes with 2D planar microstrip slow-wave structures on dielectric substrates. Precision micromachining of the microsized elements of the electromagnetic bandgap structures is challenging. Here we proposed and studied an approach for microfabrication of the electromagnetic bandgap structure with microsized patterns by pulsed laser ablation. The obtained results of the morphology studies by scanning electron microscopy and optical microscopy show that the proposed approach allows fabricating of the microsized pattern with suitable tolerance. Also, we showed several results of numerical simulations of the electromagnetic parameters of the meander-line slow-wave structure on a dielectric substrate with an incorporated electromagnetic bandgap structure.

Citation Download Citation

I. A. Chistyakov, I. I. Rasulov, A. G. Rozhnev, R. A. Torgashov, A. A. Serdobintzev, I. O. Kozhevnikov, V. V. Galushka, and A. V. Starodubov "Microfabrication of the electromagnetic bandgap structure for incorporating into the dielectric substrate of the millimeter-band planar slow-wave structure", Proc. SPIE 12193, Laser Physics, Photonic Technologies, and Molecular Modeling, 121930K (29 April 2022); https://doi.org/10.1117/12.2630865

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Dielectrics

Electromagnetism

Laser ablation

Micromachining

Microfabrication

Sputter deposition

Copper

Show All Keywords

Keywords/Phrases

Search In:

Publication Years