Paper
14 November 2022 UV light activated SnO2 thin film gas sensor for nitrogen dioxide sensing at room temperature
Chenyang Liu, Hui Huang, Zhirui Li, Jian Zhao, Pengbo Liu, Zengbing Jin, Dong An, Baoguo Liu, Guangdi Sun, Hongguang Li
Author Affiliations +
Proceedings Volume 12299, International Conference on Sustainable Technology and Management (ICSTM 2022); 122990O (2022) https://doi.org/10.1117/12.2646589
Event: International Conference on Sustainable Technology and Management (ICSTM 2022), 2022, Macao, China
Abstract
A UV light activated SnO2 thin film nitrogen dioxide sensor was fabricated by DC sputtering and oxidation. It can be directly placed in the air to detect the concentration of NO2 at RT, with a detection limit of 5 ppb. Experiments show that the sensor has good selectivity and stability. SEM, XRD, and TEM characterization indicate that the sample is mainly composed of tetragonal rutile phase SnO2. The surface presents a rough and porous granular structure, which is suitable for gas adsorption. The effect of operating temperature on NO2 sensing of SnO2 thin film gas sensor was systematically investigated. Therefore, the fabricated SnO2 thin film NO2 sensor has the promise to greatly reduce power consumption and can be used in a wider range of fields because of its characteristic that it can work normally at RT.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chenyang Liu, Hui Huang, Zhirui Li, Jian Zhao, Pengbo Liu, Zengbing Jin, Dong An, Baoguo Liu, Guangdi Sun, and Hongguang Li "UV light activated SnO2 thin film gas sensor for nitrogen dioxide sensing at room temperature", Proc. SPIE 12299, International Conference on Sustainable Technology and Management (ICSTM 2022), 122990O (14 November 2022); https://doi.org/10.1117/12.2646589
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KEYWORDS
Sensors

Thin films

Nitrogen dioxide

Ultraviolet radiation

Gas sensors

Adsorption

Metals

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