Simultaneous 2D sub-wavelength patterning and alloying of bimetal systems on silicon

S. Durbach; N. A. Hampp

doi:10.1117/12.2656304

15 March 2023 Simultaneous 2D sub-wavelength patterning and alloying of bimetal systems on silicon

S. Durbach, N. A. Hampp

Author Affiliations +

Proceedings Volume 12436, Complex Light and Optical Forces XVII; 124360M (2023) https://doi.org/10.1117/12.2656304
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Laser-induced surface modifications self-organization are alternatives to lithographic techniques for the functionalizing of surfaces on the micro- and nanoscale. Recently the fabrication of LIPSS with circularly polarized light gained increased attention. 2D patterning may be achieved on a variety of surfaces. We demonstrate the structuring of thin metal films on silicon, obtaining stripe, honeycomb, and hexagonal nanoparticle array patterns through laser-driven self-organization. Patterning is demonstrated on different metals, all showing individual pattern preferences and pattern developments dependent on the energy dose. The metal thin film thicknesses, the free energy of oxide formation and alloying, and the individual irradiation parameters affect the pattern formation and can be tuned to obtain the desired metal patterns.

Conference Presentation

Citation Download Citation

S. Durbach and N. A. Hampp "Simultaneous 2D sub-wavelength patterning and alloying of bimetal systems on silicon", Proc. SPIE 12436, Complex Light and Optical Forces XVII, 124360M (15 March 2023); https://doi.org/10.1117/12.2656304

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