Semi-insulating InP:Fe growth by hydride vapor phase epitaxy for advanced buried heterostructure quantum cascade lasers

Axel Strömberg; Balaji Manavaimaran; Xiaodan Pang; Richard Schatz; Oskars Ozolins; Sebastian Lourdudoss; David Stark; Mattias Beck; Giacomo Scalari; Jerome Faist; Jae Ha Ryu; Luke Mawst; Dan Botez; Robert Marsland; Gregory Maisons; Mathieu Carras; Yan-Ting Sun

doi:10.1117/12.2645959

15 March 2023 Semi-insulating InP:Fe growth by hydride vapor phase epitaxy for advanced buried heterostructure quantum cascade lasers

Axel Strömberg, Balaji Manavaimaran, Xiaodan Pang, Richard Schatz, Oskars Ozolins, Sebastian Lourdudoss, David Stark, Mattias Beck, Giacomo Scalari, Jerome Faist, Jae Ha Ryu, Luke Mawst, Dan Botez, Robert Marsland, Gregory Maisons, Mathieu Carras, Yan-Ting Sun

Author Affiliations +

Proceedings Volume 12440, Novel In-Plane Semiconductor Lasers XXII; 1244009 (2023) https://doi.org/10.1117/12.2645959
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Buried heterostructure quantum cascade lasers (BH-QCLs) operating at high temperature in mid-infrared (MIR) to THz spectral range are desired for chemical sensing and free-space optical communication (FOC). In this work, Fe doped semi-insulating InP (SI-InP) regrowth is demonstrated in a hydride vapor phase epitaxy (HVPE) reactor for advanced MIR and THz BH-QCLs grown by MBE and MOCVD. SI-InP regrowth is implemented in THz QCL pillar arrays and narrow width and reverse-taper MIR BH-QCLs for efficient heat dissipation. By exploiting SI-InP regrowth, the parasitic capacitance in MIR distributed feedback BH-QCL can be suppressed, which is exploited for high speed FOC application.

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Axel Strömberg, Balaji Manavaimaran, Xiaodan Pang, Richard Schatz, Oskars Ozolins, Sebastian Lourdudoss, David Stark, Mattias Beck, Giacomo Scalari, Jerome Faist, Jae Ha Ryu, Luke Mawst, Dan Botez, Robert Marsland, Gregory Maisons, Mathieu Carras, and Yan-Ting Sun "Semi-insulating InP:Fe growth by hydride vapor phase epitaxy for advanced buried heterostructure quantum cascade lasers", Proc. SPIE 12440, Novel In-Plane Semiconductor Lasers XXII, 1244009 (15 March 2023); https://doi.org/10.1117/12.2645959

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