The edge placement error characterization and optimization for advanced logic and DRAM nodes

Harm Dillen; Wim Tel; Jaap Karssenberg; Jan Mulkens; Roy Anunciado; Yichen Zhang; Konstantin Nechaev; Zuan Khalik

doi:10.1117/12.2658832

30 April 2023 The edge placement error characterization and optimization for advanced logic and DRAM nodes

Harm Dillen, Wim Tel, Jaap Karssenberg, Jan Mulkens, Roy Anunciado, Yichen Zhang, Konstantin Nechaev, Zuan Khalik

Proceedings Volume 12496, Metrology, Inspection, and Process Control XXXVII; 124960O (2023) https://doi.org/10.1117/12.2658832
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

As the term EPE was coined in the 1990ties, more recently a more inclusive definition of EPE has been proposed. Meanwhile semiconductor manufacturers see EPE as one of the main performance metrics enabling further shrink. In this paper we will give an update on the latest developments on EPE. Considering logic and memory use cases we will present evaluations of the EPE budget, including OPC model accuracy, overlay, CDU fingerprints for intra-field and inter field, overlay and local CD and placement error. The EPE fingerprint characterization is used to optimize scanner control for EPE performance on product. We will show how we can optimize the measured EPE fingerprints using scanner actuators.

Conference Presentation

Citation Download Citation

Harm Dillen, Wim Tel, Jaap Karssenberg, Jan Mulkens, Roy Anunciado, Yichen Zhang, Konstantin Nechaev, and Zuan Khalik "The edge placement error characterization and optimization for advanced logic and DRAM nodes", Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, 124960O (30 April 2023); https://doi.org/10.1117/12.2658832

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available