Nanoscale optical coherence tomography using extreme ultraviolet radiation produced with a laser plasma source based on a gas puff target

Antony Jose Arikkatt; Przemysław Wachulak; Henryk Fiedorowicz; Andrzej Bartnik; Piotr Nyga; Karol Janulewicz

doi:10.1117/12.2661524

12 December 2022 Nanoscale optical coherence tomography using extreme ultraviolet radiation produced with a laser plasma source based on a gas puff target

Antony Jose Arikkatt, Przemysław Wachulak, Henryk Fiedorowicz, Andrzej Bartnik, Piotr Nyga, Karol Janulewicz

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Proceedings Volume 12502, 22nd Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 1250207 (2022) https://doi.org/10.1117/12.2661524
Event: 22nd Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2022, Wojanow, Poland

Abstract

Optical coherence tomography (OCT) is a well-established non-destructive imaging technique providing high-resolution cross-sectional views of objects. The axial resolution of OCT is limited to single micrometers when using infrared and optical wavelengths. Recently, optical coherence tomography using broadband soft X-rays and extreme ultraviolet has been proposed to improve axial resolution. This variant of OCT, known as X-ray coherent tomography (XCT), enables axial resolution of a few nanometers. The paper presents OCT with the use of extreme ultraviolet in the wavelength range of 10–20 nm generated using a compact laser-produced plasma (LPP) source based on a double-stream gas puff target. The use of a gas puff target enables efficient extreme ultraviolet emission without producing target debris by laser ablation from a solid target. Two axisymmetric ellipsoidal grazing-incidence mirrors were used to focus the radiation from the source to the sample, and then to focus the radiation reflected from the sample to the spectrometer. We also present measurements on Silver/Zirconium multilayer periodic structures with a periodicity of 60 nm.

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Antony Jose Arikkatt, Przemysław Wachulak, Henryk Fiedorowicz, Andrzej Bartnik, Piotr Nyga, and Karol Janulewicz "Nanoscale optical coherence tomography using extreme ultraviolet radiation produced with a laser plasma source based on a gas puff target", Proc. SPIE 12502, 22nd Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 1250207 (12 December 2022); https://doi.org/10.1117/12.2661524

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KEYWORDS

Extreme ultraviolet

Optical coherence tomography

Plasma

Reflectivity

Multilayers

Spectroscopy

Gas lasers

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