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28 December 2022 A multi-category scanning acoustic image dataset: design, collection, and evaluation
Yue Zhao, Xianghong Hu, Yue Zhi, Jun Luo, Xiaoqiang Wang, Daojun Luo, Hongfeng Lv
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Proceedings Volume 12506, Third International Conference on Computer Science and Communication Technology (ICCSCT 2022); 1250631 (2022) https://doi.org/10.1117/12.2662606
Event: International Conference on Computer Science and Communication Technology (ICCSCT 2022), 2022, Beijing, China
Abstract
Scanning Acoustic Microscopy (SAM) is an essential tool for the non-destructively deriving depth-specific information, which can detect the internal morphology and defect location of Integrated Circuit (IC) sensitively. When SAM equipment works, it will generate a large number of acoustic scanning images, which provide data support for defect detection algorithm. However, due to lack of professional researchers to uniformly sort and classify these acoustic scanning data and the deficiency of standard and available acoustic scanning image datasets, it is impossible to carry out the research on intelligent detection algorithm. In order to solve the above problems, a novel Multi-category Scanning Acoustic Image (MSAI) database is presented in this paper. MSAI database including 4565 acoustic scanning images acquired from 52 products in four packaging structures (BGA, QFN, SOIC and SOP). In order to prove the availability of MSAI database, four typical convolutional neural networks are used to identify and classify the MSAI database. The experimental results show that the VGG-16 model achieves the best classification performance in IC packaging structures grading, which show a train accuracy of 99.58% and a test accuracy of 99.44%, and all network models show a good inter-class separability on MSAI database.
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Yue Zhao, Xianghong Hu, Yue Zhi, Jun Luo, Xiaoqiang Wang, Daojun Luo, and Hongfeng Lv "A multi-category scanning acoustic image dataset: design, collection, and evaluation", Proc. SPIE 12506, Third International Conference on Computer Science and Communication Technology (ICCSCT 2022), 1250631 (28 December 2022); https://doi.org/10.1117/12.2662606
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KEYWORDS
Databases
Packaging
Acoustics
Data modeling
Image processing
Detection and tracking algorithms
Image acquisition
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