A high-sensitivity EFPI acoustic sensor based on silicone rubber diaphragm

Yongzhang Chen; Yiwen Zheng; Haibing Xiao; Dezhi Liang; Yufeng Zhang; Yongqin Yu; Chenlin Du; Shuangchen Ruan

doi:10.1117/12.2656472

9 January 2023 A high-sensitivity EFPI acoustic sensor based on silicone rubber diaphragm

Yongzhang Chen, Yiwen Zheng, Haibing Xiao, Dezhi Liang, Yufeng Zhang, Yongqin Yu, Chenlin Du, Shuangchen Ruan

Proceedings Volume 12507, Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022); 125072G (2023) https://doi.org/10.1117/12.2656472
Event: 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022), 2022, Changchun, China

Abstract

A high-sensitivity optical fiber acoustic probe based on extrinsic Fabry-Perot interferometer (EFPI) is designed, fabricated, and analyzed. The sound sensitive diaphragm fabricated by silicone rubber exhibits excellent properties including good adhesion, high mechanical strength, flexibility, aging resistance, and biocompatibility. The acoustic pressure change introduces the periodic vibration of silicone rubber diaphragm, which causes the fluctuation of the output voltage. The FP cavity is formed by a cleaved end face of fiber and the silicone rubber diaphragm. The silicone rubber is prepared by a simple spin-dip method, which is easy to fabricate and suitable for mass production. A high acoustic pressure sensitivity and a high signal-to-noise ratio (SNR) of 387 mV/Pa and 48 dB at 1.5 kHz were obtained, respectively. The sensor is expected to be suitable for photoacoustic spectroscopy, week acoustic detections and biological application.

Citation Download Citation

Yongzhang Chen, Yiwen Zheng, Haibing Xiao, Dezhi Liang, Yufeng Zhang, Yongqin Yu, Chenlin Du, and Shuangchen Ruan "A high-sensitivity EFPI acoustic sensor based on silicone rubber diaphragm", Proc. SPIE 12507, Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022), 125072G (9 January 2023); https://doi.org/10.1117/12.2656472

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available