Automated lithocell

Andreas Englisch; Armin Deuter

doi:10.1117/12.20054

1 June 1990 Automated lithocell

Andreas Englisch, Armin Deuter

Proceedings Volume 1261, Integrated Circuit Metrology, Inspection, and Process Control IV; (1990) https://doi.org/10.1117/12.20054
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

Integration and automation have gained more and more ground in modern IC-manufacturing. It is difficult to make a direct calculation of the profit these investments yield. On the other hand, the demands to man, machine and technology have increased enormously of late; it is not difficult to see that only by means of integration and automation can these demands be coped with. Here are some salient points: U the complexity and costs incurred by the equipment and processes have got significantly higher . owing to the reduction of all dimensions, the tolerances within which the various process steps have to be carried out have got smaller and smaller and the adherence to these tolerances more and more difficult U the cycle time has become more and more important both for the development and control of new processes and, to a great extent, for a rapid and reliable supply to the customer. In order that the products be competitive under these conditions, all sort of costs have to be reduced and the yield has to be maximized. Therefore, the computer-aided control of the equipment and the process combined with an automatic data collection and a real-time SPC (statistical process control) has become absolutely necessary for successful IC-manufacturing. Human errors must be eliminated from the execution of the various process steps by automation. The work time set free in this way makes it possible for the human creativity to be employed on a larger scale in stabilizing the processes. Besides, a computer-aided equipment control can ensure the optimal utilization of the equipment round the clock.

Citation Download Citation

Andreas Englisch and Armin Deuter "Automated lithocell", Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); https://doi.org/10.1117/12.20054

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Process control

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