Presentation + Paper
10 August 2023 Simulation of light scattering from complex 3D structures for confocal microscope using accelerated boundary element method
L. Fu, A. Birk, K. Frenner, Sai Gao, S. Reichelt
Author Affiliations +
Abstract
Optical metrology faces significant challenges as functional devices continue to shrink in size due to new patterning processes for semiconductor chips. Consequently, there is a growing interest in modeling optical systems to achieve more accurate measurements and to compare measurements from different optical instruments, such as confocal microscopes, white light interference microscopes, and focus-varied microscopes. Previous models have employed either a thin layer approximation or 2D periodic structures to simulate light scattering. However, to accurately simulate more complex structures and compare them with experimental data, there is a need for a physically accurate modeling and simulation tool that can handle large-scale aperiodic 3D surfaces. To address this need, we have developed a simulation tool called SpeckleSim, which utilizes the boundary element method. By incorporating a multi-level fast multiple method, we are able to calculate light scattering from 3D nanostructures within a reasonable timeframe. In this report, we adapt the method to a confocal microscopy model and investigate the extent to which it can reproduce surface profiles for different types of structures. The obtained results will be compared with experimental measurements and the results from other rigorous simulation tools such as rigorous coupled wave analysis (RCWA) method.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. Fu, A. Birk, K. Frenner, Sai Gao, and S. Reichelt "Simulation of light scattering from complex 3D structures for confocal microscope using accelerated boundary element method", Proc. SPIE 12619, Modeling Aspects in Optical Metrology IX, 1261908 (10 August 2023); https://doi.org/10.1117/12.2688329
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Confocal microscopy

Microscopes

Light scattering

Equipment

3D modeling

Modeling

Silicon

Back to Top