Simulation of a gas sensor on the integrated photonics silicon nitride platform

Yana V. Aleksakina; Aida G. Zakoyan; Vladislav V. Ivanov; Ruslan V. Kutluyarov; Grigory S. Voronkov

doi:10.1117/12.2681200

4 October 2023 Simulation of a gas sensor on the integrated photonics silicon nitride platform

Yana V. Aleksakina, Aida G. Zakoyan, Vladislav V. Ivanov, Ruslan V. Kutluyarov, Grigory S. Voronkov

Proceedings Volume 12743, Optical Technologies for Telecommunications 2022; 127430K (2023) https://doi.org/10.1117/12.2681200
Event: Optical Technologies for Telecommunications 2022, 2022, Ufa, Russian Federation

Abstract

The article describes an approach to simulating a microring resonator structure on the silicon nitride integrated photonics platform when exposed to various hazardous to human health gases. We simulated various gases by changing the refractive index of the medium surrounding the resonator from 1 (vacuum) to 1.001768 (CCl₄). The microring structure resonant wavelengths varied for various gases, and the quality factor, sensitivity, and intrinsic detection limit were determined. The simulation results show that it is possible to detect a wide range of gases hazardous to human health, including carbon tetrachloride, mercury vapor, carbon monoxide, and nitrogen monoxide, using the developed sensor. However, it is impossible to distinguish the last two gases based on the results of the current work using the SiN platform. Coatings are one of the potential ways to improve the designed sensor for detecting these gases.

Citation Download Citation

Yana V. Aleksakina, Aida G. Zakoyan, Vladislav V. Ivanov, Ruslan V. Kutluyarov, and Grigory S. Voronkov "Simulation of a gas sensor on the integrated photonics silicon nitride platform", Proc. SPIE 12743, Optical Technologies for Telecommunications 2022, 127430K (4 October 2023); https://doi.org/10.1117/12.2681200

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Sensors

Gases

Silicon nitride

Microrings

Microresonators

Resonators

Waveguides

Show All Keywords

Keywords/Phrases

Search In:

Publication Years