An improved signal processing circuit design of heterodyne dual-frequency laser interference displacement measurement system

Song-Xiang Liu; Jian-Jun Chen; Qiu-Xia Zhao; Qian-Qian Zhang; Cheng Lin

doi:10.1117/12.2687336

28 November 2023 An improved signal processing circuit design of heterodyne dual-frequency laser interference displacement measurement system

Song-Xiang Liu, Jian-Jun Chen, Qiu-Xia Zhao, Qian-Qian Zhang, Cheng Lin

Author Affiliations +

Proceedings Volume 12772, Real-time Photonic Measurements, Data Management, and Processing VII; 127720G (2023) https://doi.org/10.1117/12.2687336
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Conference Poster

Abstract

Heterodyne dual-frequency laser interference displacement measurement has been widely applied in the measurement in precision mechanical systems. A signal modulation circuit with four-phase quadrant-square wave output was proposed to improve the sensitivity of displacement detection in the differential dual-frequency laser interference displacement measurement system. A front-end photoelectric conversion circuit, mixing circuit, waveform conversion circuit and fourway quadrantal square wave shaping circuit are designed and manufactured. Heterodyne dual-frequency laser interference displacement testing platform was built in the laboratory and the circuit test was finished. The detection speed of the system reach 3m/s, the measurement frequency range is 3.3-10MHz, and the accuracy reach 0.5ppm. The theoretical resolution of the system is a quarter of the laser vacuum wavelength, which is about 0.158 μm.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Song-Xiang Liu, Jian-Jun Chen, Qiu-Xia Zhao, Qian-Qian Zhang, and Cheng Lin "An improved signal processing circuit design of heterodyne dual-frequency laser interference displacement measurement system", Proc. SPIE 12772, Real-time Photonic Measurements, Data Management, and Processing VII, 127720G (28 November 2023); https://doi.org/10.1117/12.2687336

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available