Total process solution for the grinding and polishing of precision optics

Caroline Watt; Michael Max; Christian Jentgens; William Gemmill

doi:10.1117/12.2691692

29 November 2023 Total process solution for the grinding and polishing of precision optics

Caroline Watt, Michael Max, Christian Jentgens, William Gemmill

Proceedings Volume 12778, Optifab 2023; 1277811 (2023) https://doi.org/10.1117/12.2691692
Event: SPIE Optifab, 2023, Rochester, New York, United States

Abstract

An in-depth study of the total process solution from grind to final polish was performed for borosilicate-crown glass and fused silica. SQUADRO-G2 grinding pad and the industrial standard fixed abrasive grinding pad were compared on a double-side tool. The surface roughness and the material removal rate were compared for the grinding step. SQUADROG2 had a comparable material removal rate for fused silica and a higher removal rate for borosilicate-crown glass. After the fine-grinding step, samples were polished with Ultra-Sol^® Optiq on various polishing pads. The processes were studied by comparing removal rates, surface quality, and the amount of material removed to achieve a low surface roughness, defect free substrate post-grinding. There was no difference observed for the finishing of glass that was ground with SQUADRO-G2 grinding pad and the standard fixed abrasive grinding pad. Furthermore, we offer some compelling case studies for achieving superior surface quality in the final polish operations.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Caroline Watt, Michael Max, Christian Jentgens, and William Gemmill "Total process solution for the grinding and polishing of precision optics", Proc. SPIE 12778, Optifab 2023, 1277811 (29 November 2023); https://doi.org/10.1117/12.2691692

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