Error analysis and comparison of wavelength tuning phase shifting interferometry of transparent optical flats

Lin Chang; Jiehua Gao; Yingjie Yu

doi:10.1117/12.3007413

18 December 2023 Error analysis and comparison of wavelength tuning phase shifting interferometry of transparent optical flats

Lin Chang, Jiehua Gao, Yingjie Yu

Author Affiliations +

Proceedings Volume 12968, AOPC 2023: Optic Fiber Gyro ; 129681H (2023) https://doi.org/10.1117/12.3007413
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China

Abstract

Wavelength-tuning phase-shifting interferometry has advantages over conventional hardware phase-shifting for the simultaneous detection of all surfaces of the transparent parallel flats. The Fourier transform and its derivative methods can be used to characterize the signal based on the optical path difference and the phase-shifting value of the corresponding interferometric harmonic signals on each measured surface and to solve for the phase accordingly. Therefore, considering the influence of the sampling length and the choice of the window function in the Fourier transform on the measurement results, based on the established multi-surface interference model, an adequate simulation analysis is carried out, and the corresponding explanations and discussions are given subsequently. In practical measurements, the appropriate window function and sampling length should be selected according to the corresponding measurement conditions, so that reliable measurements can be guaranteed.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Lin Chang, Jiehua Gao, and Yingjie Yu "Error analysis and comparison of wavelength tuning phase shifting interferometry of transparent optical flats", Proc. SPIE 12968, AOPC 2023: Optic Fiber Gyro , 129681H (18 December 2023); https://doi.org/10.1117/12.3007413

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