Multiplexing interferometers using range-resolved interferometry

Thomas Kissinger

doi:10.1117/12.3016268

18 June 2024 Multiplexing interferometers using range-resolved interferometry

Thomas Kissinger

Proceedings Volume 12997, Optics and Photonics for Advanced Dimensional Metrology III; 129970J (2024) https://doi.org/10.1117/12.3016268
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

Optical interferometry is widely used for high-precision displacement measurements in many areas of science and technology. Multiplexing interferometers to obtain interferometric phase measurements at multiple locations along a single beam is, however, a relatively new idea. This is possible using laser wavelength-modulated interferometric signal processing approaches such as the range-resolved interferometry (RRI) technique that can separately demodulate phase signals with sub-nanometer resolution from multiple interferometers with differing optical path lengths. Novel capabilities provided by RRI, include, for example, position or angular encoders with multiple degrees-of-freedoms that are multiplexed onto a single fiber-coupled access port. Also, the tomographic view of all signal sources present in an interferometric setup can be very useful for diagnostic purposes and allows additional absolute distance measurements. Furthermore, the ability to cleanly suppress multiple reflections allows for highly linear phase measurements. Therefore, range-resolved signal processing techniques open up novel solutions to existing measurement problems in precision engineering and advanced dimensional metrology.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Thomas Kissinger "Multiplexing interferometers using range-resolved interferometry", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 129970J (18 June 2024); https://doi.org/10.1117/12.3016268

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available