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Huangcheng Shangguan,Paul Urbach, andJeroen Kalkman
"Lensless single-shot dual-wavelength digital holography for integrated circuit metrology", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 1299714 (7 April 2024); https://doi.org/10.1117/12.3016436
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Huangcheng Shangguan, Paul Urbach, Jeroen Kalkman, "Lensless single-shot dual-wavelength digital holography for integrated circuit metrology," Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 1299714 (7 April 2024); https://doi.org/10.1117/12.3016436