A twin, double-sided heterodyne interferometer for studying subnanometer drift displacement in opto-mechanical devices.

Walter Knulst

doi:10.1117/12.3022482

7 April 2024 A twin, double-sided heterodyne interferometer for studying subnanometer drift displacement in opto-mechanical devices.

Walter Knulst

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Proceedings Volume 12997, Optics and Photonics for Advanced Dimensional Metrology III; 129971J (2024) https://doi.org/10.1117/12.3022482
Event: SPIE Photonics Europe, 2024, Strasbourg, France

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Walter Knulst "A twin, double-sided heterodyne interferometer for studying subnanometer drift displacement in opto-mechanical devices.", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 129971J (7 April 2024); https://doi.org/10.1117/12.3022482

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