The technique proposed in this paper provides inspection of functional surfaces quality of micro-components by nondestructive testing, with high resolution and increased sensitivity. The control is done in real time and instantaneously on all inspected surface. Component geometry accuracy is one of parameters which influences, function accuracy. Moiré topography is full-field optical technique in which the shape of object surfaces is measured by means of moiré interferometry. The technique has found various applications in diverse fields, from biomedical to industrial and scientific applications. In many industrial optical metrology applications, contactless and nondestructive shape measurement is a desirable tool for, quality control and contour mapping. on surfaces that are of the order of few mm2 and more. Optical device used allows a significant dimensional surface magnification of up to 1000 times the area inspected, which allows easy processing and reaches an exceptional nanometric imprecision of measurements.
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