Research on the technology of quickly removing subsurface damage of hard and brittle optical elements

Ning Pei; Dasen Wang; Fengming Nie

doi:10.1117/12.3014237

4 March 2024 Research on the technology of quickly removing subsurface damage of hard and brittle optical elements

Ning Pei, Dasen Wang, Fengming Nie

Proceedings Volume 13070, Speckle 2023: VIII International Conference on Speckle Metrology; 130700C (2024) https://doi.org/10.1117/12.3014237
Event: Speckle 2023: VIII International Conference on Speckle Metrology, 2023, Xi'an, China

Abstract

For applications such as inertial confinement fusion and remote imaging detection, optical components need to meet the requirements of ultra smooth and low loss, and their manufacturing methods must meet the requirements of eliminating surface defects and subsurface damage. This paper mainly studies a polishing method for large-diameter optical components, which combines classical polishing with equal vacuum ionization polishing to balance polishing efficiency and removal of damaged layers. The idea of combined polishing can be extended to the comprehensive application of various polishing methods.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Ning Pei, Dasen Wang, and Fengming Nie "Research on the technology of quickly removing subsurface damage of hard and brittle optical elements", Proc. SPIE 13070, Speckle 2023: VIII International Conference on Speckle Metrology, 130700C (4 March 2024); https://doi.org/10.1117/12.3014237

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available