Development of sample rotator for focused ion beam micro-nano machining system

Hailin Guo; Siling Huang; Shiyan Zhao; Xu Zhang; Chaoxiang Xia; Ning Pei; Dasen Wang

doi:10.1117/12.3014240

4 March 2024 Development of sample rotator for focused ion beam micro-nano machining system

Hailin Guo, Siling Huang, Shiyan Zhao, Xu Zhang, Chaoxiang Xia, Ning Pei, Dasen Wang

Proceedings Volume 13070, Speckle 2023: VIII International Conference on Speckle Metrology; 130700E (2024) https://doi.org/10.1117/12.3014240
Event: Speckle 2023: VIII International Conference on Speckle Metrology, 2023, Xi'an, China

Abstract

o achieve the positioning and multi-degree-of-freedom machining of rotary micro-feature structures on the five- axis motion table in the focused ion beam micro-nano machining system, a high-precision sample rotator based on worm gear drive in vacuum environment is designed. The finite element method is used to simulate and optimize the key components. After loading, the maximum deformation of the component is less than 0.2μm, and the natural frequency is more than 10000Hz, which meet the requirements of the working accuracy and strength of the component. The focused ion beam machining experiment of high aspect ratio microstructure of metal material was carried out by using this sample rotator, and the surface roughness of metal material after machining was better than 5nm. The developed sample rotator expands the processing range of focused ion beam processing system.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Hailin Guo, Siling Huang, Shiyan Zhao, Xu Zhang, Chaoxiang Xia, Ning Pei, and Dasen Wang "Development of sample rotator for focused ion beam micro-nano machining system", Proc. SPIE 13070, Speckle 2023: VIII International Conference on Speckle Metrology, 130700E (4 March 2024); https://doi.org/10.1117/12.3014240

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available