Design of x-y-θz large-stroke uncoupled parallel piezoelectric positioning platform

Zhiyi Hu; Xingyang Xie; Yuguo Cui; Yiling Yang

doi:10.1117/12.3026019

1 April 2024 Design of x-y-θz large-stroke uncoupled parallel piezoelectric positioning platform

Zhiyi Hu, Xingyang Xie, Yuguo Cui, Yiling Yang

Proceedings Volume 13082, Fourth International Conference on Mechanical Engineering, Intelligent Manufacturing, and Automation Technology (MEMAT 2023); 1308212 (2024) https://doi.org/10.1117/12.3026019
Event: 2023 4th International Conference on Mechanical Engineering, Intelligent Manufacturing and Automation Technology (MEMAT 2023), 2023, Guilin, China

Abstract

This paper introduces the design of a three-degree-of-freedom parallel piezoelectric micro-platform with simple and compact structure, large stroke and no coupling. Firstly, the driving unit of the micro-moving platform is designed by using the flexible bridge amplifier mechanism of double-layer flexible thin plate, and the platform body of the micro-moving platform is designed based on the double-parallelogram flexible mechanism, and then a new configuration of the x-y-θz parallel piezoelectric micro-moving platform with large displacement stroke is designed. Finally, the static and dynamic performance of the platform is tested by finite element simulation. The results show that the developed platform performs well, and the platform along x, y and θz direction is 308.72μm, 404.72μm and 2.79mrad, and the natural frequencies are 101.76 Hz, 119.71 Hz, and 134.53 Hz, respectively.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Zhiyi Hu, Xingyang Xie, Yuguo Cui, and Yiling Yang "Design of x-y-θz large-stroke uncoupled parallel piezoelectric positioning platform", Proc. SPIE 13082, Fourth International Conference on Mechanical Engineering, Intelligent Manufacturing, and Automation Technology (MEMAT 2023), 1308212 (1 April 2024); https://doi.org/10.1117/12.3026019

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