A freeform mirror profiler with a very wide dynamic range and a high precision

Masahito S. Uchiyama; Taiki Bessho; Hitoshi Tokoro; Mori Megumi; Yuji Ikeda

doi:10.1117/12.3019442

26 August 2024 A freeform mirror profiler with a very wide dynamic range and a high precision

Masahito S. Uchiyama, Taiki Bessho, Hitoshi Tokoro, Mori Megumi, Yuji Ikeda

Proceedings Volume 13100, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation VI; 131004E (2024) https://doi.org/10.1117/12.3019442
Event: SPIE Astronomical Telescopes + Instrumentation, 2024, Yokohama, Japan

Conference Poster

Abstract

We have developed a new non-contact profiler which can measure aspherical mirrors including freeform surfaces. One of the best features of this instrument is its very wide dynamic range of 0.01 to 100 μm, while maintaining interferometerlevel measurement precision. It utilizes Computer-Generated Holograms (CGH) for generating the arbitrary wavefront. The wide dynamic range is achieved by integrating two modes, “Interferometer Mode" and "Hartmann Mode," which can be switched by changing the internal optical path without the need to move the measurement mirror. The measurement accuracy is 0.0053 μm RMS in Interferometer Mode and 0.055 μm RMS in Hartmann Mode. The Interferometer Mode provides a measurable dynamic range from 0.0053 to 31 μm, while the Hartmann Mode extends from 0.055 to 625 μm when measuring a spherical surface of F-number 1.0.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Masahito S. Uchiyama, Taiki Bessho, Hitoshi Tokoro, Mori Megumi, and Yuji Ikeda "A freeform mirror profiler with a very wide dynamic range and a high precision", Proc. SPIE 13100, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation VI, 131004E (26 August 2024); https://doi.org/10.1117/12.3019442

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available