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We have developed a new non-contact profiler which can measure aspherical mirrors including freeform surfaces. One of the best features of this instrument is its very wide dynamic range of 0.01 to 100 μm, while maintaining interferometerlevel measurement precision. It utilizes Computer-Generated Holograms (CGH) for generating the arbitrary wavefront. The wide dynamic range is achieved by integrating two modes, “Interferometer Mode" and "Hartmann Mode," which can be switched by changing the internal optical path without the need to move the measurement mirror. The measurement accuracy is 0.0053 μm RMS in Interferometer Mode and 0.055 μm RMS in Hartmann Mode. The Interferometer Mode provides a measurable dynamic range from 0.0053 to 31 μm, while the Hartmann Mode extends from 0.055 to 625 μm when measuring a spherical surface of F-number 1.0.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Masahito S. Uchiyama, Taiki Bessho, Hitoshi Tokoro, Mori Megumi, Yuji Ikeda, "A freeform mirror profiler with a very wide dynamic range and a high precision," Proc. SPIE 13100, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation VI, 131004E (26 August 2024); https://doi.org/10.1117/12.3019442