Fabrication of 12×14 MEMS-based Fabry-Pérot tunable filter array

Song Liu; Jun Cao; Weiping Wang; Lintong Yan; Meng Zhang; Jing Cao

doi:10.1117/12.3023909

18 March 2024 Fabrication of 12×14 MEMS-based Fabry-Pérot tunable filter array

Song Liu, Jun Cao, Weiping Wang, Lintong Yan, Meng Zhang, Jing Cao

Proceedings Volume 13104, Advanced Fiber Laser Conference (AFL2023); 131046Z (2024) https://doi.org/10.1117/12.3023909
Event: Advanced Fiber Laser Conference (AFL2023), 2023, Shenzhen, China

Abstract

This paper presents the fabrication of a tunable Fabry-Perot (F-P) filter array using microelectromechanical systems (MEMS) technology for infrared multispectral imaging and infrared communication. The primary focus of the study is on the design and fabrication process of the F-P filter structure, resulting in the successful creation of a tunable 12×14 MEMS F-P filter array. The experimental findings demonstrate a tunable spectral range spanning from 3.78 μm to 4.89 μm, with a maximum wavelength tuning amplitude of 1.11 μm and a maximum spectral transmittance of 72%. The fabrication procedure demonstrates compatibility with the current CMOS process, hence enabling the incorporation of a tunable MEMS F-P filter module via MOEMS-CMOS heterogeneous integration technology. The MEMS F-P tunable filter, functioning as a dispersive component, exhibits promising potential for various applications such as wavelength division multiplexing, multispectral imaging, and gas sensing spectroscopy.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Song Liu, Jun Cao, Weiping Wang, Lintong Yan, Meng Zhang, and Jing Cao "Fabrication of 12×14 MEMS-based Fabry-Pérot tunable filter array", Proc. SPIE 13104, Advanced Fiber Laser Conference (AFL2023), 131046Z (18 March 2024); https://doi.org/10.1117/12.3023909

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